منابع مشابه
MOEMS Accelerometer Evaluation Regarding Resolution And Comparison With ADXL203
This work presents the results of the characterization of two innovative MOEMS accelerometers [1] (Fig. 1) in comparison to the high-end commercial sensor ADXL203 from Analog Devices. The focus hereby mainly lies on the discussion of the respective noise spectral densities. The characterization setup for the MOEMS sensors is schematically depicted in Fig. 2. The sinusoidal excitation of the dev...
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Significant progresses have been made in MOEMS for display, imaging, telecommunication, and bioinstrumentation applications. This talk will first provide an overview of the recent advances in micromirror technologies. Then it will discuss three novel applications using MEMS micromirrors. First, a large port count wavelength-selective switch using a one-dimensional array of two-axis analog micro...
متن کاملA top-down design flow for MOEMS
As MOEMS (Micro-Opto-Electro-M echanical Systems) transition from laboratory curiosities to production products inserted into telecommunication systems, a top down design flow is necessary to minimize time-to-market. We present a structured-custom approach for MOEMS design based on the concept of using parameterized behavioral models as a means to improve and speed up the design process. This a...
متن کاملStrongly Passively Damped MOEMS Vibration Sensor
Usually, one favors a low resonance peak for vibration sensing, since this expands the measurement range. Furthermore, one wants to avoid ringing. Both requirements are met by a high damping, i.e. a low quality factor of Q ~ 1. In this contribution, we show that it is possible to design a micro-opto-electro-mechanical system (MOEMS) vibration sensor featuring a strong passive damping leading to...
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ژورنال
عنوان ژورنال: Procedia Engineering
سال: 2012
ISSN: 1877-7058
DOI: 10.1016/j.proeng.2012.09.099